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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5,   Pages 801-809 doi: 10.1631/FITEE.2100236

Abstract: We propose an inductor-capacitor (LC) wireless passive , which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using . It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s). Moreover, the maximum error of the accelerometer was less than 0.037%.

Keywords： Bending structure surfaces     Flexible accelerometer     Micro-electro-mechanical system (MEMS) technology    

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Frontiers of Mechanical Engineering 2023, Volume 18, Issue 2, doi: 10.1007/s11465-023-0747-1

Abstract: However, attention has been rarely given on the influences of external mechanical and internal electricalIn this work, a bionic swallow structure design norm was developed for mechanical decoupling, and theinfluences of structural parameters on mechanical behavior were fully analyzed and optimized.High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058%

Keywords： micro-electro-mechanical system capacitive sensor     bionics     operation instability     mechanical and electrical    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different biasBased on the theoretical results, micro accelerometer is fabricated and tested to study the influences

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Strategic Study of CAE 2002, Volume 4, Issue 6,   Pages 56-62

Abstract:

The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging andIt is based on bulk silicon bonding technology and film sealed technology.The bulk silicon bonding technology includes electrostatic bonding, silicon direct bonding and interfacialIt is used to seal micro channel or micro hole to form a vacuum or low-pressure cavity or protect fromhigh importance not to forget packaging at the beginning of a project, when hoping to industrialize MEMS

Keywords： packaging of MEMS     bulk silicon bonding technology     film-sealed technology    

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1,   Pages 37-43 doi: 10.1007/s11465-008-0001-x

Abstract: A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, whichare based on micro electro-mechanical systems (MEMS) technology.Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volumeThe final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer

Keywords： mini-spectrophotometer     referenced     micro-silicon-fixer     electro-mechanical     correlation coefficient    

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Special issue: Micro-electromechanical systems (MEMS)

Zhuangde JIANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 457-458 doi: 10.1007/s11465-017-0492-4

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Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Strategic Study of CAE 2000, Volume 2, Issue 3,   Pages 36-41

Abstract:

The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.Thepackaging of devices under dry atmosphere or vacuum are the most important methods to prevent the in MEMSThe preparation technology of anti-stiction films and its problems are described.However, friction still exists in MEMS of direct contact moving parts.films with anti-stiction and wear-resitsting ability are the key research projects in high speed moving MEMS

Keywords： micro electro mechanical systems     stiction     friction     anti-stiction films     wear-resisting films    

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Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Frontiers in Energy 2009, Volume 3, Issue 4,   Pages 381-388 doi: 10.1007/s11708-009-0057-2

Abstract: The effect of Joule heating on the steady state electro-osmotic flow in a closed-end micro-channel ispresence of Joule heating causes an increase in temperature and a decrease in viscosity in the whole micro-channelfluid velocity at the central region in order to maintain a zero flow rate at the cross section of the micro-channelas a micro-actuator.significantly smaller than that without considering Joule heating when the wall temperature of the micro-channel

Keywords： closed-end micro-channel     electrical double layer     electro-osmotic flow     induced pressure gradient     Joule    

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Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Frontiers of Engineering Management 2016, Volume 3, Issue 2,   Pages 115-122 doi: 10.15302/J-FEM-2016019

Abstract: assessment method and the life cycle cost analysis, the optimal timing model of active remanufacturing for electro-mechanicalremanufacturing as its guidance, this study explores the economic efficiency and corresponding operation mode of electro-mechanicalTo validate the optimal timing model for electro-mechanical products active remanufacturing, a specific

Keywords： electro-mechanical products     active remanufacturing     optimal timing     reverse logistics     recycling mode    

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Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 18-32 doi: 10.1007/s11465-017-0410-9

Abstract:

Device miniaturization is an emerging advanced technology in the 21st century.The miniaturization of devices in different fields requires production of micro- and nano-scale componentsThese fields mainly include optics, electronics, medicine, bio-technology, communications, and avionicsThis paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining.

Keywords： micro machining     cutting     electro discharge machining (EDM)     laser machining     focused ion beam (FIB)    

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Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

Frontiers of Structural and Civil Engineering 2021, Volume 15, Issue 4,   Pages 1047-1057 doi: 10.1007/s11709-021-0755-3

Abstract: The micro-steel fibers (MSF) were added to MPC-based concrete to enhance its ductility due to the highThis paper investigates the effect of MSF volume fraction on the mechanical properties of a new pattern

Keywords： magnesium phosphate cement-based concrete     micro-steel fibers     four-point flexural strength     compressive    

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Strategic Research on Disruptive Technologies in the Field of Mechanical and Vehicle Engineering

Yang Yanming, Zhao Yun, Shao Zhufeng, Li Daochun, Gao Zenggui, Zhang Zilong, Shen Yue, Wang Linjun

Strategic Study of CAE 2018, Volume 20, Issue 6,   Pages 27-33 doi: 10.15302/J-SSCAE-2018.06.005

Abstract: literature research and expert interviews, the existing or potential disruptive technologies in the field of mechanicaland vehicle engineering were proposed: bionic intelligent technology, shaftless rim propulsion technology, intelligent unmanned aerial vehicle technology, ultra-loop train technology, and electromechanicalsystems (MEMS).Finally, the suggestions for the development of disruptive technologies in the field of mechanical and

Keywords： mechanical and vehicle engineering     disruptive technologies     bionic intelligent technology     shaftlessrim propulsion technology     intelligent unmanned aerial vehicle technology     ultra-loop train technology     MEMS    

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Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers

Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili

Frontiers of Chemical Science and Engineering 2018, Volume 12, Issue 1,   Pages 174-183 doi: 10.1007/s11705-017-1670-y

Abstract: Polysulfone (PSf) membranes were modified by either a new organic modifier (sulfonated poly(ether sulfide sulfone), SPESS) or a traditional modifier (rice hulk). These membranes were further reinforced with either multi-walled carbon nanotubes (MWCNTs) or silica nanoparticles. Having a dye rejection of 98.46%, the reinforced membranes increased more than 50% in strength but no change in solution flux was observed. The morphological and roughness studies were conducted using scanning electron microscopy and atomic force microscopy. Moreover, the PSF membranes were also characterized by differential scanning calorimetry. Modifying the membranes with organic modifier or nanofiller increases the glass transition temperature ( ). The highest and strength were observed for the PSf-SPESS-MWCNT membrane. SPESS decreases surface roughness but MWCNT increases roughness on the nanoscale. All membranes show a bimodal pore size distribution, whereas the PSf-SPESS-MWCNT membrane exhibits a relatively uniform distribution of macroscopic and microscopic pores.

Keywords： polysulfone membrane     mechanical properties     micro- and nano-modification     binary and ternary system     dye    

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Development and application of high-end aerospace MEMS

Weizheng YUAN

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 567-573 doi: 10.1007/s11465-017-0424-3

Abstract:

This paper introduces the design and manufacturing technology of aerospace microelectromechanicalsystems (MEMS) characterized by high performance, multi-variety, and small batch.Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental

Keywords： MEMS     design and manufacture technology     aeronautic and aerospace    

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Research of MEMS and Development of One-chip RF - MEMS

Zhong Xianxin,Yu Wenge,Li Xiaoyi,Wu Zhengzhong,Liu Jixue,Chen Shuai,Shao Xiaoliang

Strategic Study of CAE 2004, Volume 6, Issue 7,   Pages 21-25

Abstract:

Micro-electro-mechanical integration system, called microsystem for short is one of forefront technologiesdevices, double the function density, information density and interlinkage density of apparatus and systemThe significance of MEMS and its basic theory are expounded in this paper.MEMS technology is one of the ultimate resolutions for one-chip wireless communication equipment isThe evolvement status about one-chip mechanical electronic integration microsystem for wireless communication

Keywords： microsystem     integration     one-chip     wireless communication system    

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Title Author Date Type Operation

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Journal Article

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Journal Article

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Journal Article

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Journal Article

Special issue: Micro-electromechanical systems (MEMS)

Zhuangde JIANG

Journal Article

Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Journal Article

Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Journal Article

Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Journal Article

Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

Journal Article

Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

Journal Article

Strategic Research on Disruptive Technologies in the Field of Mechanical and Vehicle Engineering

Yang Yanming, Zhao Yun, Shao Zhufeng, Li Daochun, Gao Zenggui, Zhang Zilong, Shen Yue, Wang Linjun

Journal Article

Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers

Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili

Journal Article

Development and application of high-end aerospace MEMS

Weizheng YUAN

Journal Article

Research of MEMS and Development of One-chip RF - MEMS

Zhong Xianxin,Yu Wenge,Li Xiaoyi,Wu Zhengzhong,Liu Jixue,Chen Shuai,Shao Xiaoliang

Journal Article